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No. of Chambers | 2 (1 Process Chamber and 1 Pass Chamber) |
Nominal Size Main Chamber (Width) | 1200 mm (47.2”) | 1600 mm (62.9”) | 2000 mm (78.7”) |
External Dimensions (W x D x H) | With Pod Flange | With BIBO | 1200 mm x 780 mm x 3000 mm (47.2” x 30.7” x 118.1”) | 1600 mm x 780 mm x 3000 mm (62.9” x 30.7” x 118.1”) | 2000 mm x 780 mm x 3000 mm (78.7” x 30.7” x 118.1”) |
Without BIBO | 1200 mm x 780 mm x 2600 mm (47.2” x 30.7” x 102.4”) | 1600 mm x 780 mm x 2600 mm (62.9” x 30.7” x 102.4”) | 2000 mm x 780 mm x 2600 mm (78.7” x 30.7” x 102.4”) |
With Adjustable Base Stand (Min) | 1200 mm x 780 mm x 2300 mm (47.2” x 30.7” x 90.6”) | 1600 mm x 780 mm x 2300 mm (62.9” x 30.7” x 90.6”) | 2000 mm x 780 mm x 2300 mm (78.7” x 30.7” x 90.6”) |
With Adjustable Base Stand (Max) | 1200 mm x 780 mm x 2700 mm (47.2” x 30.7” x 106.3”) | 1600 mm x 780 mm x 2700 mm (62.9” x 30.7” x 106.3”) | 2000 mm x 780 mm x 2700 mm (78.7” x 30.7” x 106.3”) |
Without Pod Flange | With BIBO | 1200 mm x 695 mm x 3000 mm (47.2” x 27.4” x 118.1”) | 1600 mm x 695 mm x 3000 mm (62.9” x 27.4” x 118.1”) | 2000 mm x 695 mm x 3000 mm (78.7” x 27.4” x 118.1”) |
Without BIBO | 1200 mm x 695 mm x 2600 mm (47.2” x 27.4” x 102.4”) | 1600 mm x 695 mm x 2600 mm (62.9” x 27.4” x 102.4”) | 2000 mm x 695 mm x 2600 mm (78.7” x 27.4” x 102.4”) |
With Adjustable Base Stand (Min) | 1200 mm x 695 mm x 2300 mm (47.2” x 27.4” x 90.6”) | 1600 mm x 695 mm x 2300 mm (62.9” x 27.4” x 90.6”) | 2000 mm x 695 mm x 2300 mm (78.7” x 27.4” x 90.6”) |
With Adjustable Base Stand (Max) | 1200 mm x 695 mm x 2700 mm (47.2” x 27.4” x 106.3”) | 1600 mm x 695 mm x 2700 mm (62.9” x 27.4” x 106.3”) | 2000 mm x 695 mm x 2700 mm (78.7” x 27.4” x 106.3”) |
External Dimensions (W x D x H) with 1000 mm Pass Through Chamber | With Pod Flange | With BIBO | 2465 mm x 780 mm x 3000 mm (97.0” x 30.7” x 118.1”) | 2865 mm x 780 mm x 3000 mm (112.8” x 30.7” x 118.1”) | 3265 mm x 780 mm x 3000 mm (128.5” x 30.7” x 118.1”) |
Without BIBO | 2465 mm x 780 mm x 2600 mm (97.0” x 30.7” x 102.4”) | 2865 mm x 780 mm x 2600 mm (112.8” x 30.7” x 102.4”) | 3265 mm x 780 mm x 2600 mm (128.5” x 30.7” x 102.4”) |
With Adjustable Base Stand (Min) | 2465 mm x 780 mm x 2300 mm (97.0” x 30.7” x 90.6) | 2865 mm x 780 mm x 2300 mm (112.8” x 30.7” x 90.6”) | 3265 mm x 780 mm x 2300 mm (128.5” x 30.7” x 90.6”) |
With Adjustable Base Stand (Max) | 2465 mm x 780 mm x 2700 mm (97.0” x 30.7” x 106.3”) | 2865 mm x 780 mm x 2700 mm (112.8” x 30.7” x 106.3”) | 3265 mm x 780 mm x 2700 mm (128.5” x 30.7” x 106.3”) |
Without Pod Flange | With BIBO | 2465 mm x 695 mm x 3000 mm (97.0” x 27.4” x 118.1”) | 2865 mm x 695 mm x 3000 mm (112.8” x 27.4” x 118.1”) | 3265 mm x 695 mm x 3000 mm (128.5” x 27.4” x 118.1”) |
Without BIBO | 2465 mm x 695 mm x 2600 mm (97.0” x 27.4” x 102.4”) | 2865 mm x 695 mm x 2600 mm (112.8” x 27.4” x 102.4”) | 3265 mm x 695 mm x 2600 mm (128.5” x 27.4” x 102.4”) |
With Adjustable Base Stand (Min) | 2465 mm x 695 mm x 2300 mm (97.0” x 27.4” x 90.6”) | 2865 mm x 695 mm x 2300 mm (112.8” x 27.4” x 90.6”) | 3265 mm x 695 mm x 2300 mm (128.5” x 27.4” x 90.6”) |
With Adjustable Base Stand (Max) | 2465 mm x 695 mm x 2700 mm (97.0” x 27.4” x 106.3”) | 2865 mm x 695 mm x 2700 mm (112.8” x 27.4” x 106.3”) | 3265 mm x 695 mm x 2700 mm (128.5” x 27.4” x 106.3”) |
External Dimensions (W x D x H) with 600 mm Pass Through Chamber | With Pod Flange | With BIBO | 2065 mm x 780 mm x 3000 mm (81.3” x 30.7” x 118.1”) | 2465 mm x 780 mm x 3000 mm (97.0” x 30.7” x 118.1”) | 2865 mm x 780 mm x 3000 mm (112.8” x 30.7” x 118.1”) |
Without BIBO | 2065 mm x 780 mm x 2600 mm (81.3” x 30.7” x 102.4”) | 2465 mm x 780 mm x 2600 mm (97.0” x 30.7” x 102.4”) | 2865 mm x 780 mm x 2600 mm (112.8” x 30.7” x 102.4”) |
With Adjustable Base Stand (Min) | 2065 mm x 780 mm x 2300 mm (81.3” x 30.7” x 90.6”) | 2465 mm x 780 mm x 2300 mm (97.0” x 30.7” x 90.6”) | 2865 mm x 780 mm x 2300 mm (112.8” x 30.7” x 90.6”) |
With Adjustable Base Stand (Max) | 2065 mm x 780 mm x 2700 mm (81.3” x 30.7” x 106.3”) | 2465 mm x 780 mm x 2700 mm (97.0” x 30.7” x 106.3”) | 2865 mm x 780 mm x 2700 mm (112.8” x 30.7” x 106.3”) |
Without Pod Flange | With BIBO | 2065 mm x 695 mm x 3000 mm (81.3” x 27.4” x 118.1”) | 2465 mm x 695 mm x 3000 mm (97.0” x 27.4” x 118.1”) | 2865 mm x 695 mm x 3000 mm (112.8” x 27.4” x 118.1”) |
Without BIBO | 2065 mm x 695 mm x 2600 mm (81.3” x 27.4” x 102.4”) | 2465 mm x 695 mm x 2600 mm (97.0” x 27.4” x 102.4”) | 2865 mm x 695 mm x 2600 mm (112.8” x 27.4” x 102.4”) |
With Adjustable Base Stand (Min) | 2065 mm x 695 mm x 2300 mm (81.3” x 27.4” x 90.6”) | 2465 mm x 695 mm x 2300 mm (97.0” x 27.4” x 90.6”) | 2865 mm x 695 mm x 2300 mm (112.8” x 27.4” x 90.6”) |
With Adjustable Base Stand (Max) | 2065 mm x 695 mm x 2700 mm (81.3” x 27.4” x 106.3”) | 2465 mm x 695 mm x 2700 mm (97.0” x 27.4” x 106.3”) | 2865 mm x 695 mm x 2700 mm (112.8” x 27.4” x 106.3”) |
Internal Dimensions (W x D x H) | 1192 mm x 630 mm x 842 mm (46.9” x 24.8” x 33.1”) | 1592 mm x 630 mm x 842 mm (62.7” x 24.8” x 33.1) | 1992 mm x 630 mm x 842 mm (78.4” x 24.8” x 33.1) |
Chamber Sheet Metal | Stainless Steel Type 316L (interior) Stainless Steel Type 304 (exterior) |
Filter Type | ULPA filter (U15) |
Support Frame & Service Housing | Stainless Steel Type 304 |
Chamber Environment | ISO Class 5 (Grade A) |
Airflow Type | Turbulent |
Lighting Intensity | ≥ 500 Lux (≥ 47 foot-candles) |
Noise Level | ≤ 65 dBA |
Electrical Requirement | AC 230-240 V, 50/60 Hz, 1 Ph, 25A |